Fraunhofer ISIT - Production facilities

For its activities, Fraunhofer ISIT disposes of a 150 mm silicon technology line and 2500 m² of clean-room space. The institute has a further 450 m² of clean-room area (class 100) available for specific microsystems engineering processes. A further 200 m² clean-room (class 10-100) is equipped for chemical-mechanical polishing (CMP) and post-CMP cleaning.

Together with Vishay Semiconductor Itzehoe GmbH, the institute operates a professional semiconductor production line which is up-to-date in all required quality certifications. The line is used not only for producing microelectronic components (PowerMOS) and microsystems, but also for R&D projects aimed at developing new components and technological processes.

ISIT also offers a diverse selection of labs (1500 m²) that are utilised by working groups for the development of chemical, biological and thermal processes, electrical and mechanical component characterisation, and for assembly and interconnection technology. Moreover, ISIT has a pilot assembly line for lithium polymere accumulators for capacities in the range of 600-1000 mAh.